【Key words】 Micro-motion worktable; Piezoelectric ceramic actuators; Hysteresis nonlinearity; Hysteresis nonlinearity model; self-sensing; compound control;
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压电陶瓷执行器已广泛应用于工业生产及科学研究中。
Piezoelectric actuators are widely used in industrial and academia applications.
压电陶瓷执行器的迟滞特性是影响其定位精度的主要因素。
The hysteresis of piezoceramic actuators is the main challenge of its positioning accuracy.
通过实验研究了压电陶瓷执行器在不同情况下的迟滞非线性。
The hysteresis nonlinearity of piezoceramic actuators under different conditions has been studied.
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