本文研究了一种新型微机械CMOS热导压力敏感器。
A new micromachined CMOS thermal conductivity pressure sensor has been developed.
提出了一种新的光纤压力传感器的设计，该传感器敏感膜采用了台面结构而非传统的平面结构。
A novel pressure sensor with a mesa structure diaphragm is presented, which has a mesa structure diaphragm rather than the planar one.
通过对常用支撑结构的力学分析与性能对比，选用简支梁作为压力传感器敏感变形机构。
After analyzing and comparing the performance of normal bracing structures in mechanics, we use a freely supported beam for sensing deforming structure.
应用推荐