本论文研究了非均匀基底上亚单原子层薄膜与多层薄膜的生长行为，考察了基底的非均匀性对原子扩散、聚集过程的影响。
In the thesis, we investigate submonolayer and multilayers film growth process, especially study the influence of surface heterogeneities on adatoms diffusion and aggregation.
杂质原子诱发成对孪晶及单孪晶的的可能性各为50%。
Both of the formation possibility of the coupled twins and single twin induced by impurity atom are 50%.
可操作反应器来以单原子层精度以及高速化学气相处理模式处理多个挠性或扁平衬底。
The reactor can be operated to process multiple flexible or flat substrates with a single atomic layer precision as well as high-speed chemical vapor processing mode.
应用推荐