提供一种群管理系统、半导体制造装置以及信息处理方法。

A group management system, a semiconductor manufacturing device and an information processing method are provided.

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半导体制造中的自动组合装置是半导体制造的关键设备和瓶颈设备。

Cluster tools are the critical equipment for semiconductor manufacture, and usually, the bottleneck equipment.

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本发明涉及扩散薄膜的沉积方法和装置，用于半导体制造和各种工其的表面涂覆中。

This invention relates to a method and apparatus for deposition of a diffused thin film, useful in the fabrication of semiconductors and for the surface coating of various tools.

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