本文重点讨论了曲面光刻的关键技术——自动调焦系统，并对曲面工艺及光刻线条进行实验分析。

The study of this dissertation analyses the focus system technology, which is the key technology of curve plane surface lithographic fabrication techniques.

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本文根据几何非线性有限元理论，提出张力膜结构初始形态分析的8结点曲面四边形等参单元。

Based on the geometrical nonlinear finite element (GNFE) theory, a curved quadrilateral isoperimetric element with 8 nodes for initial form analysis of tensile membrane structures is presented.

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通过对曲面接触类型分析，提出了带状密切的概念。

The concept of band osculation is presented by analyzing surface contact types.

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