同时给出了金属反射镜有限元分析模型。
At the same time, the finite element analysis of metallic mirror model is also presented.
使用KOH各向异性腐蚀液制作了垂直微反射镜阵列,并对实验结果进行了分析和讨论。
Using the KOH anisotropy enchant the vertical micro mirror array is fabricated. And also, the result of experiment is analyzed and discussed.
阐述了金属反射镜的设计,包括反射镜材料的选择,反射镜结构的选择,分析了影响金属反射镜面型精度的因素。
The design of metallic mirrors which including materials selecting and structure designing as well as factors of influencing surface for metallic mirrors are discussed.
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