概述了不使用光致掩模和光致抗蚀剂的无掩模布线形成技术,金属纳米粒子和纳米油墨的研究开发,喷墨法的应用和今后的课题。
This paper describes the maskless wiring formation technology not using photomask and photoresist, development of metal nano particle and nano ink, application of the inkjet method and future theme.
根据本发明可提供能够适用于排出喷嘴式的抗蚀剂涂布法的正型光致抗蚀剂组合物。
The positive photoresist composition which is suitable for used in a resist coating method by a discharge nozzle system can be provided according to the invention.
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