optical patterning
... Patterning Bodies 阵列实体 array patterning 阵列图象形成 optical patterning 光刻成像 ...
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显微光刻图像形成 microlithographic patterning
无光刻胶图像形成 resistless patterning
切割和光刻、组织成像 tissue imaging
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为此,研究了接近式紫外光刻中部分相干光的传播过程,建立了相应的光刻理论模型,对光刻成像中的误差产生机理进行分析。
To give an error analysis of this effect, the propagation of partial coherent light in the proximity UV-lithography was investigated and the relative theoretical model was proposed.
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