结果表明：电火花线切割单晶硅损伤层主要由杂质元素重污染层、重熔层和含有高密度位错的弹性畸变层组成；
The results show that the damaged layer of silicon cut by WEDM mainly appears massive impurity elements, remelted and elastic distortion with a high density dislocation.
波形畸变主要来自两个方面：固体中晶格原子之间作用力的非线性以及固体中位错和超声的非线性相互作用。
The distortion mainly comes from two mechanisms: the nonlinearity of the lattice potential and the interaction between the ultrasonic waves and dislocations.
应用推荐