方向位移传感器采用激光单点位置探测器P SD, Z轴方向的位移测量精度达10纳米。
The displacement sensor of Z axis adopts single point laser position detector PSD, and its resolution is about 10nm.
介绍了用于激光核聚变装置光路自动准直系统,讨论了光束位置探测器,激光器,微机等技术问题。
The papaer describes an automatic optical alignment system for laser-fusion facility. Technical problems concerning the beam centering sensor, laser and the computer etc are discussed.
提出一种眼镜度数测量方法,利用位置探测器和3条光线实现对棱镜度、球镜度和散光度等镜片参数的测量。
A position detector and 3 beams of ray are used to measure the prismatic, spherical and astigmatic powers.
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