内对流敏感元件传感器 sensor with intrnalconvection sensitive element
外对流敏感元件传感器 sensor with externalconvection sensitive element
裸丝敏感元件传感器 sensor with bare wire sensitive element
高灵敏度的氟里昂气体传感器是检测氟里昂泄漏的关键元件，本文叙述了氟里昂气敏器件的制作工艺、敏感原理、测试方法及测试结果。
Freon sensor with high sensitivity is key device for detecting freon leak. The manufacture technology, sensitivity mechanism, measure method and parameter of samples have beendiscribed in this paper.
通过对敏感元件的优化设计，改善了传感器的线性度、敏度、度稳定性指标。
The linearity, sensitivity and stability against temperature variation of the sensor are improved by optimizing design to the sensitive element.
本文设计的微气压传感器的制作工艺与集成电路工艺兼容，结构上主要包括加热电阻、敏感元件和测试电阻等三部分。
The micro gas pressure sensor designed in this thesis can be fabricated using an IC compatible process, and it is composed of a heating resistor, a sensitive element and a testing resistor.
应用推荐