为了降低二维位置定位系统的成本,提出了一种基于线阵列电荷耦合器件(CCD)的测量方法。
To reduce cost of the two dimension position system, a method using linear array charge coupled device (CCD) was proposed.
利用光电位置传感器和二维双光杠杆放大,能够测量出二维微小距离的变化。
The change of two dimensional micro distance is measured by using a position sensor and the two dimensional amplification of double optical lever.
可测量台阶高度,槽宽,在二维方向确定孔或轴的位置。
Measure the height of STeps, width of grooves, position of bores or shafts in 2 co-ordinates.
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