non-planeness measurement
... 不排水试验 disdrainage test 不平度测量 non-planeness measurement 不平衡财政 unbalanced finance ...
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工程地表面不平度测量 Measurement of Ground Surface Roughness on Engineering
不平行度测量 [测] non-parallelism measurement
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提出一种新的步进扫描投影光刻机工件台方镜不平度测量方法。
A novel in-situ non-flatness measurement method of wafer stage mirrors in a step-and scan lithographic tool is presented.
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