本文从MOEMS倾斜下电极扭臂式光开关出发，介绍了动力学分析方法的过程。
This paper presents theoretical analysis on the dynamic response of a MOEMS optical switch with a slant lower electrode.
从基于微机械光电系统（MOEMS）的倾斜下电极扭臂式光开关出发， 求解雷诺方程， 得到空气压膜阻尼系数和阻尼力矩的分析公式。
This paper presents theoretical analysis for the effect of air squeeze film damping on a micro-opto- electro -mechanical systems (MOEMS) optical switch with a slant lower electrode.
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