又称硅氯仿。甲硅烷的三氯代物。为一种易流动的无色液体，密度1.34克/厘米³ ；能溶于苯、氯仿和二硫化碳。
本发明是三氯氢硅差压耦合精馏系统及操作方法。
The invention relates to a trichlorosilane differential pressure coupling rectification system and an operation method thereof.
介绍了治理三氯氢硅合成炉尾气的方法，并进行了比较。
The method of tail gas harness of trichlorosilane synthesis furnace were introduced and compared.
分析了三氯氢硅合成炉出口反应气体组分数据存在的问题。
The existing problems of gas data of synthesis furnace exit of trichlorosilane were analysed.
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