absentee layer

• 1. 虚设层: absentee layer
• 2. 虚拟设备层: VIRTUAL DEVICE LAYER

• 1.一种掩模的布图方法，包括为一层建立虚设图案抑制区域和单一类型的虚设图案。
  A layout method for a mask includes creating dummy pattern inhibiting regions and a single dummy pattern type for a layer.
  dict.yoduao.com

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