ion etching equipment

• 1. 离子刻蚀设备: ion etching equipment
• 2. 反应离子刻蚀设备: Reactive Ion Etching Machine
• 3. 等离子刻蚀设备: Etcher | plasma etching apparatus

• 1.通过深紫外光刻和感应耦合等离子刻蚀设备，制备了所设计的器件。
  The designed SOI nanowire AWGs were fabricated using ultraviolet lithography and induced coupler plasma etching.
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