1.  corrosion
2.  sculpture
3.  mechanical erosion

• 1. 反应离子刻蚀: Reactive-ion etching | RIE | RIE Etching | RIE-Reactive Ion Etch
• 2. 离子束刻蚀法: ion beam lithography | ion beam printing | ibl
• 3. 深反应离子刻蚀: DRIE | Deep Reactive Ion Etching

更多释义

• 1.更精细的刻蚀技术可以孕育更高性能的微芯片，而这仅仅是开始。
  Finer etching begets higher-performing microchips, and that's just a start.
  dict.yoduao.com
• 2.用电子束刻蚀法在晶片上镀上纳米级铝层形成了电感器。
  Inductors were defined by electron-beam lithography and formed by depositing micron-thick aluminium metal onto the wafers.
  dict.yoduao.com
• 3.通常，所有暴露在刻蚀剂中的材料都具有一定的刻蚀速率。
  More often, all of the materials exposed to the etchant have a finite etch rate.
  dict.yoduao.com

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