• 1. Optical MEMS: 微光学 | 微光机电系统 | 光学MEMS | 光学式微机电系统
• 2. optical-MEMS: 光微机电系统
• 3. Optical MEMs andMicro: 光学微系统与微纳米技术

更多释义

• 1.The basic concept of optical switch, MEMS and MEMS optical switch were introduced.
  介绍了光开关、MEMS和MEMS光开关的基本概念。
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• 2.Expansibility is a very important performance for the design of MEMS optical switch array.
  在MEMS光开关阵列设计中，扩展性是一项非常重要的指标。
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• 3.Effects of residual stresses on the optical and mechanical performances of MEMS-based microgratings were investigated using finite element simulation method.
  微型光栅结构薄膜中由于残余应力的存在引起器件在光学和机械性能方面发生显著变化。
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