• 讨论了入射角、入射方位角、入射波长介质折射率矩形光衍射级次数目关系。

    The relationships between the number of diffraction order and grating pitch, refractive index of medium, light wavelength, incidence Angle and azimuth Angle are investigated.

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  • 刷新率变化衍射效应导致衍射效率下降,使得曝光深度误差增加

    The variation of refresh rate and diffraction by opaque lattice will lead to reducing diffraction efficiency and this will increase exposure depth error.

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  • 束相干写入稳态相位衍射效率进行数值模拟,发现某一角度范围内衍射效率有最大值存在。

    Diffraction efficiency was simulated theoretically in the stable state phase during the double coherent light coupling and a maximum value of diffraction efficiency was discovered in some Angle scope.

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  • 国内外普遍使用条纹系统中,衍射效应很明显的,造成条纹信号比(度)正弦不好主要原因。

    In an amplitude grating system of small grid pitch, the diffractive light is the main cause to deteriorate the contrast and sinusoidal property of Moiré signals.

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  • 基于夫琅禾费衍射理论,推导了平行入射衍射光强角度分布。

    On the basis of Fraunhofer diffraction theory, the diffraction patterns of a Varied Line-space (VLS) grating were obtained for incidence beam in parallel and uniform.

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  • 方法可用于斜入射情形下具有复杂结构任意单元截面介质近场及其衍射特性分析。

    The presented scheme is useful to study the diffractionproblem of dielectric gratings with arbitrary shape and complicated configuration.

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  • 采用控制系统刻划实践表明,所设计光电式刻划控制系统已完全达到高密度衍射的亚微米距分度要求

    The ruling practice using the control system shows that the photoelectric control system meets the sub-micrometer graduation requirement of high-density gratings.

    youdao

  • 采用控制系统刻划实践表明,所设计光电式刻划控制系统已完全达到高密度衍射的亚微米距分度要求

    The ruling practice using the control system shows that the photoelectric control system meets the sub-micrometer graduation requirement of high-density gratings.

    youdao

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