对聚焦离子束曝光技术作了介绍。
In this paper, Focused Ion Beam Lithography technology and is introduced.
建立了一台简单实用的单级透镜聚焦离子束(FIB)系统。
A simple and practical single-lens focused ion beam (FIB) System has been built.
用数值模拟方法研究了聚焦离子束系统中微波离子枪的束光学性能。
The ion beam optics of a microwave ion gun for a focused ion beam (FIB) system is investigated numerically in this article.
概述了聚焦离子束直接写入、离子研磨、离子注入及离子沉积技术。
An overview of the FIB direct write technique, applications in milling, implantation, and deposition is given.
采用聚焦离子束和场发射扫描电镜对处于临界破坏状态的节瘤缺陷做剖面分析和观察。
Nodular defects, which are in critical state of damage, are cross-sectioned by focusing on the ion beam and by imaging using a field emission scanning electron microscope.
如果芯片有问题，应该直接研究金属层来察看电路，而对于聚焦离子束系统则应该重新布线。
If there was a problem with the chip, you could probe the metal directly to watch the circuitry, and, with a focused-ion-beam system, you could even rewire it.
根据目前的实验研究报道，这种周期结构金属薄膜通常利用聚焦离子束刻蚀工艺来获得，器件的光学响应在可见光波段和近红外波段。
In most of the experiments reported to date, the perforated metal films were fabricated by the focused-ion-beam method, and their transmission enhancement was in the visible and near-infrared regions.
研究人员用聚焦的铯离子束将水分子自包裹体中打出并用质谱仪测量其数量。
The researchers used a focused beam of caesium ions to dislodge molecules of water from the inclusions and measured the amount with a mass spectrometer.
全息图是用精细聚焦的离子束在一片30n m厚的薄硅膜上切割出20nm长的极小的裂纹的图案组合而成的。
The holograms were fabricated using a very finely focused ion beam to cut a pattern of extremely small slits just 20 nm across through a thin silicon membrane 30 nm thick.
在没 有这种补充的情况下，离子束会“爆炸”，导致强度的损失和束聚焦的破坏。
Without this supplement, ion beams can 'blow-up' causing loss of intensity and disruption of beam focusing.
主要介绍了箍缩聚焦二极管和自箍缩离子束二极管的研究进展。
The structure and principle of pinch reflex ion beam diode were introduced.
本发明公开了一种离子束传输控制优化方法，包括如下步骤：（1）调节偏转电源，使得聚焦杯获得束流极大值；
The invention discloses an optimum method to control ion beam transmission, which comprises the following steps: (1) adjusting deflecting power to make focusing cup produce beam maximum;
本发明公开了一种离子束传输控制优化方法，包括如下步骤：（1）调节偏转电源，使得聚焦杯获得束流极大值；
The invention discloses an optimum method to control ion beam transmission, which comprises the following steps: (1) adjusting deflecting power to make focusing cup produce beam maximum;
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