本发明提出一种多晶硅生产过程中的三氯氢硅分离提纯系统及操作方法。
The invention provides a system for separating and purifying trichlorosilane in production process of polysilicon and an operation method thereof.
本发明提出一种多晶硅生产过程中的三氯氢硅分离提纯系统及操作方法。
The invention provides a system for separating and purifying trichlorosilane in production process of polysilicon and an operation method thereof.
应用推荐