本论文是以光学扫瞄系统为基础，针对矽晶片内部的结构成像设计出有效方便的架构。
The purpose of this thesis is based on optical scanning systems to probe the inner structures of silicon IC chips by compendious and valid methods.
本论文是以光学扫瞄系统为基础，针对矽晶片内部的结构成像设计出有效方便的架构。
The purpose of this thesis is based on optical scanning systems to probe the inner structures of silicon IC chips by compendious and valid methods.
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