对于大口径精密投影光刻制版镜头来说，透镜的应力变形和中心误差对整个系统的成像质量有较大影响。
For big aperture's precision photolithographic plate-making lenses, the stress distortion and centering errors of lenses can make a bad effect on imaging quality.
超精密气浮工件台系统是当前主流光刻机中的核心子系统，要求具有纳米级的重复定位精度和同步运动精度。
Stage system is one of the most important sub systems in a step and scanner, the accuracy of its positioning and synchronizing has reached nanometer level.
超精密气浮工件台系统是当前主流光刻机中的核心子系统，要求具有纳米级的重复定位精度和同步运动精度。
Stage system is one of the most important sub systems in a step and scanner, the accuracy of its positioning and synchronizing has reached nanometer level.
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