本文采用交替施加高偏压和低偏压的方法，合成出了具有软膜和硬膜结构的无氢类金刚石多层膜。
Using an alternating high- and low-bias voltage, we have formed hydrogen-free multilayers of hard and soft diamond-like carbon films.
本文采用交替施加高偏压和低偏压的方法，合成出了具有软膜和硬膜结构的无氢类金刚石多层膜。
Using an alternating high- and low-bias voltage, we have formed hydrogen-free multilayers of hard and soft diamond-like carbon films.
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