而以上这些指标的控制应由洁净室空调系统、排风系统和空气滤网系统等各个子系统来协同完成。
Inside a clean room, MAU(make-up air unite) system, process exhaust system and FFU(fan filter unit) system are coordinated to meet the requirements of those clean room indicators.
清理过滤网，在入口端装一个空气滤清器；
Clean screen pack, install a air filter at the entrance to the end;
清理过滤网，在入口端装一个空气滤清器；
Clean screen pack, install a air filter at the entrance to the end;
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