激光直写机是制作衍射光学元件的关键设备，离焦检测技术是其中的重要单元技术之一。
Laser direct writing system is the key equipment for fabrication of optical diffractive elements, and the defocus detection technique is the important sub-tech in it.
本文在传统差动像散检测方法基础上，给出一种基于单向离焦的差动像散检测方法。
In this paper, the differential astigmatic detection method for defocus measurement with one-way defocused detector is developed from the conventional differential as.
目前实时检测的内容主要有焊接过程的稳定性、装配质量、离焦量、焊缝熔深和表面形貌、熔池与小孔的形态等。
The present research mainly focuses on detecting the processing stability, assembly quality, defocusing, weld penetration, weld shape, pool and keyhole, etc.
目前实时检测的内容主要有焊接过程的稳定性、装配质量、离焦量、焊缝熔深和表面形貌、熔池与小孔的形态等。
The present research mainly focuses on detecting the processing stability, assembly quality, defocusing, weld penetration, weld shape, pool and keyhole, etc.
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