设计了一套强度调制型光纤真空度传感系统,并利用真空腔室金属膜片压差的弹性微形变实现了反射式光纤真空度连续检测。
Constructs fiber optical sensing system for vacuum measuring, carries out vacuum measuring using elastic deformation of metal diaphragm for reflex fiber sensor.
设计了一套强度调制型光纤真空度传感系统,并利用真空腔室金属膜片压差的弹性微形变实现了反射式光纤真空度连续检测。
Constructs fiber optical sensing system for vacuum measuring, carries out vacuum measuring using elastic deformation of metal diaphragm for reflex fiber sensor.
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