我们用该方法计算了硅压阻式加速度传感器五阶梯硅梁固频和振型。
We calculated the natural frequencies and mode of vibration for a five stepped Si-beam of Si-piezoresistive accelerometer.
我们用该方法计算了硅压阻式加速度传感器五阶梯硅梁固频和振型。
We calculated the natural frequencies and mode of vibration for a five stepped Si-beam of Si-piezoresistive accelerometer.
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