采用双晶片探头和电子天平对PZT微力传感器进行静态力标定，进而利用双晶片探头和电荷放大器对PZT微力传感器进行准静态标定，微小信号检测通过锁相放大器来实现。

PZT micro -force sensors were calibrated by bimorph and electronic balance in static state and by bimorph and charge amplifier in dynamic state, small signal was tested by amplifier.

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采用双晶片探头和电子天平对PZT微力传感器进行静态力标定，进而利用双晶片探头和电荷放大器对PZT微力传感器进行准静态标定，微小信号检测通过锁相放大器来实现。

PZT micro -force sensors were calibrated by bimorph and electronic balance in static state and by bimorph and charge amplifier in dynamic state, small signal was tested by amplifier.

youdao