通过改变反应气体的比率或成膜输出，可以使无机光刻胶层的氧浓度在厚度方向不同。
The oxygen concentration of the inorganic resist layer can be varied along the thickness direction by changing the proportion or film formation output of reactive gas.
通过改变反应气体的比率或成膜输出，可以使无机光刻胶层的氧浓度在厚度方向不同。
The oxygen concentration of the inorganic resist layer can be varied along the thickness direction by changing the proportion or film formation output of reactive gas.
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