前言：对用电子显微镜测量薄膜厚度的三种方法：双束衍射法、污斑法、污线法进行了实验及比较分析。
The experiments , comparison and analysis for the three thickness measurement methods :two-beam diffraction method , contamination spot method and contamination line method were carried out.
前言：对用电子显微镜测量薄膜厚度的三种方法：双束衍射法、污斑法、污线法进行了实验及比较分析。
The experiments , comparison and analysis for the three thickness measurement methods :two-beam diffraction method , contamination spot method and contamination line method were carried out.
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