交换工作台，节省上下料时间，提高工作效率。
Adopts the exchangeable worktable to save loading and unloading time, and to chieve high work efficiency.
针对一种IC制造装备中的双工位交换工作台系统的结构，建立其动力学模型。
According to the structure of a duplex pallet changer which was used in an IC manufacturing equipment, the dynamic model can be built.
针对一种IC制造装备中的双工位交换工作台系统的结构，建立其动力学模型。
According to the structure of a duplex pallet changer which was used in an IC manufacturing equipment, the dynamic model can be built.
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