• 对准控制采用阶梯逐步逼近算法并且引入了机械手姿态调整补偿控制,提高对准效率。

    Furthermore, a stepwise approach with varying step lengths, and a compensation strategy following the manipulator's rotation are introduced in the IC mask alignment.

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  • 随着迭代次数增加迭代区间逐步减小直至逼近由此即可构造定界迭代算法

    Along with the increasing of iteration times, iterative range will gradually dwindle until approach to true value, and demarcation iterative algorithm can be constructed.

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  • 由此提出一种算法通过逐步修正求解得到设计实现在设计点附近较高精度地逼近结构真实极限状态方程

    Therefore an algorithm is developed to (approximate) the limit state equation accurately around the true design point through iterative modifications for the design point solution.

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  • 数学模型图解几何图形为依据,并逐步逼近算法求解。

    The mathematical model is based on the calculation of geometrical figures by graphic method and the solution is obtained by successive approximation.

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  • 数学模型图解几何图形为依据,并逐步逼近算法求解。

    The mathematical model is based on the calculation of geometrical figures by graphic method and the solution is obtained by successive approximation.

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