介绍该装置的结构组成、基本工作原理，特别重点介绍了微机械加速度传感器的结构设计、加工工艺流程。
The basic working principle, structural composition of the device was introduced with focuses on structural design and processing technique of the micro-mechanical accelerometer.
介绍该装置的结构组成、基本工作原理，特别重点介绍了微机械加速度传感器的结构设计、加工工艺流程。
The basic working principle, structural composition of the device was introduced with focuses on structural design and processing technique of the micro-mechanical accelerometer.
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