该腔室可具有联接 于腔室上并用于为腔室提供热量的至少一个板式加热器，以及位于腔 室上以有助于冷却腔室的多个翅片。

The chamber may have at least one plate heater coupled thereto for providing heat to the chamber and a plurality of fins on the chamber to assist in cooling the chamber.

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该腔室可具有联接 于腔室上并用于为腔室提供热量的至少一个板式加热器，以及位于腔 室上以有助于冷却腔室的多个翅片。

The chamber may have at least one plate heater coupled thereto for providing heat to the chamber and a plurality of fins on the chamber to assist in cooling the chamber.

youdao