报道了扩散阻挡层材料氮化钨的结构特性随组分变化的情况。
The variation of structure information of tungsten nitride (WNx) with nitrogen con - tent is observed.
以偏钨酸氨为原料，采用喷雾干燥、焙烧、球磨和纯氨氮化工艺进行了氮化钨粉体制备研究。
Nanometer tungsten nitride powders were synthesized as amm onium metatungstate by means of spray drying, calcination, milling and nitration in pure ammonia.
以偏钨酸氨为原料，采用喷雾干燥、焙烧、球磨和纯氨氮化工艺进行了氮化钨粉体制备研究。
Nanometer tungsten nitride powders were synthesized as amm onium metatungstate by means of spray drying, calcination, milling and nitration in pure ammonia.
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