在横向构件上应提供适当的排放孔和透气孔，底部区域的扇形孔的半径应不小于100mm。
Suitable drain holes and air holes to be provided on transverse structural members. The scallops in bottom area to be not less than 100mm radius.
第二种方法是在翼面上装置铰链，用一个对不同安装角钻有不同孔的外部扇形件与之配合。
A second method is to furnish the surfaces with hinges and to use an exterior sector with drilled holes for each Angle setting.
其上放置晶片的传送臂的表面具有在扇形区域中多个以等间距形成的抽吸孔。
A surface of the transporting arm on which a wafer is placed is provided with a plurality of suction holes formed at equal intervals in a fan-shaped region.
带中心孔的无间隙扇形分隔进口设计；
带中心孔的无间隙扇形分隔进口设计；
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