所有芯片制造厂都使用类似的设备,包括深反应离子蚀刻工具和晶片键合机。
And all of the foundries utilize similar equipment, which includes deep reactive ion etch tools and wafer bonders.
通过反应离子刻蚀可以将光刻胶微透镜图形转移至这种高性能的聚合物材料上。
Pattern transfer technique is used to transfer photoresist microlens arrays into the polymer underlayer.
衍射光学元件的制作技术主要包括激光或电子束直写、反应离子刻蚀、离子束铣及薄膜沉积。
DOE's fabrication techniques mainly include laser beam or electron beam writing, RIE, ion milling and thin film deposition.
我们同时对反应离子刻蚀工艺中的等离子体充电效应和离子轰击对氧化硅造成的损伤进行了讨论。
At the same time, the influence of plasma charging and ion bombardment on the quality of silicon oxide are analyzed.
新兴的3d互联技术以及高产量的MEMS应用需要成本低廉以及高产量的深层反应离子刻蚀系统。
Emerging 3d interconnection technologies and high volume MEMS applications require cost effective mass production DRIE systems.
对于光刻胶的去除用热丙酮泡、超声清洗、反应离子刻蚀和高温灰化法相结合,能达到较好的效果。
The other is the removal of SU-8, which can be resolved by the combination of marinating in hot acetone, ultrasonic cleanout, RIE and cineration at high temperature.
加速度计用普通的N型硅片制造,为了刻蚀高深宽比的结构,使用了深反应离子刻蚀(DRIE)工艺。
This accelerometer is fabricated by N type silicon wafer. To obtain high aspect ratio structure, deep reactive ion etching(DRIE) process is employed.
利用离子束刻蚀(IBE)和反应离子刻蚀(RIE)等干法刻蚀方法来制造带栅极的场发射阴极阵列。
The gated silicon field emitter arrays (FEA) with small gate aperture have been successfully fabricated by dry etching, including ion beam etching (IBE) and reactive ion etching (RIE).
通过改变流动相的流速和比例改变离子源中反应离子的种类和数量,研究离子化环境对蒽醌类化合物电离方式的影响。
Effects of ionization environment, including reaction ions type and amounts in APCI source, on ionization mode of anthraquinones were examined by changing the flow rate and mobile phase proportion.
对二氧化硅反应离子刻蚀中反应室压力,刻蚀气体流量和射频功率等因素对刻蚀速率和刻蚀均匀性的影响进行了研究。
The influence of chamber pressure, gas flow rate and RF power on micro loading effect in reactive ion etch of silicon dioxide is researched.
采用微波电子回旋共振等离子体反应离子刻蚀(E CR-R IE)装置对牦牛毛纤维进行表面改性,从而改善牦牛毛的可纺性。
Yak hairs were treated by the microwave electron cy cl otron resonance plasma reactive ion etching(ECR-RIE) equipment to improve its property of weave.
采用经过参数优化的DRIE刻蚀深硅槽,并用反应离子刻蚀(RIE)对深槽开口形状进行修正,制造了具有理想侧壁形状的深槽,利于介质的完全填充,避免产生空洞。
By optimizing DRIE parameters and RIE etching the trenches' opening, the ideal trench profile is obtained to ensure that the trenches are fully refilled without voids.
对部分稀土离子参与下LeuRS催化的的氨酰化反应表观稳态动力学性质进行了研究。
The apparent steady state kinetics of the aminoacylation reaction catalyzed by LeuRS at the participation of some RE 3+ was studied.
但是整个离子移动和化学反应的过程比在电容中进行的电子运动要慢。
But the whole process of ion movement and chemical reaction is slower than the movement of electrons in a capacitor.
像所有的金属一样,铁原子与其他元素反应,释放电子形成带正电的离子。
Like all metals, these react with other elements by giving up electrons to form positively charged ions.
这就化解了和捕捉水母有关的难题,并且让使用生物荧光反应来侦测钙离子变得更加简单。
This bypassed the problems associated with jellyfish collection and made it much easier to use bioluminescent reactions to detect the presence of calcium ions.
一些在后来的反应中形成铵离子,通过下雪回到地球被保存在冰核中,成为发现这巨大事件的证据。
Some of the ammonium, or NH4+, ions generated during subsequent reactions fall back to Earth in snow and are preserved in ice cores, where they linger as signs of the cataclysmic event.
研究人员在小鼠脑内注入某种良性病毒,这种病毒使细胞膜上和细胞兴奋有关的离子通道对光产生反应。
Researchers have engineered a benign virus that, when injected into the brain, makes the ion channels—the switches that turn cells on and off—responsive to light.
在压水式反应堆里,热水在高压下通过钢管循环,金属离子不断从管壁上溶解到水中。
In a pressurised-water reactor, hot water circulates at high pressure through steel piping, dissolving metal ions from the walls of the pipes.
氡容易离子化,这让人期望,该元素有最广泛的化学反应,但是,这个元素最稳定的同位素也极不稳定,这使氡的研究受到了严重的约束。
Although the easier ionization of radon leads one to expect the most extensive chemistry for that element, the high instability of even the most stable isotope has severely limited studies of it.
典型锂离子电池中一半的材料在电池内部的化学反应方面起不到任何作用。
About half of a typical lithium-ion battery is made of stuff that plays no direct part in the battery's chemistry.
这是物理学家第一次明确地证实了梦寐以求的夸克胶子等离子体(或叫“夸克汤”)反应。
This is the first time that physicists were able to positively confirm the creation of the much sought after quark-gluon plasma, or ‘quark soup’.
冷却水被泵送到反应堆中心的时候,这些溶解下来的金属离子受到中子的轰炸,导致其中有一部分离子也具有了放射性。
When the water is pumped through the reactor's core, these ions are bombarded by neutrons and some of them become radioactive.
这将有助于研究人员挑选出最适合热核反应堆的建筑材料,因为热核反应堆与高温等离子体会发生接触。
It will help to choose optimal construction materials for elements of the thermonuclear reactor that contacts with hot plasma.
这些变“重”的电子不再能快速对激光做出反应,这样激光就得以在等离子体中传播了。
These heavier electrons cannot react quickly enough; hence the laser beam propagates through the plasma.
海洋酸化还会进一步引起连锁化学反应:更多的氢离子意味着碳酸氢根离子多了,而碳酸根离子少了。
Ocean acidification has further chemical implications: more hydrogen ions mean more bicarbonate ions, and fewer carbonate ions.
在那里,石灰会与水中溶解的二氧化碳反应,生成碳酸氢根离子。
There, it reacts with CO2 dissolved in the water, converting it into bicarbonate ions.
最后,大气甲烷与羟基离子发生反应,生成二氧化碳和水。
Eventually, atmospheric methane reacts with hydroxil ions to form CO2 and water.
最后,大气甲烷与羟基离子发生反应,生成二氧化碳和水。
Eventually, atmospheric methane reacts with hydroxil ions to form CO2 and water.
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