介绍了微机械薄膜变形镜光学影响函数的理论表达式以及其具有的线性叠加性。
The mathematical expressions of the optical influence functions for micromachined membrane deformable mirror and their superposition nature are introduced.
介绍了微机械薄膜变形镜光学影响函数的理论表达式以及其具有的线性叠加性。
The mathematical expressions of the optical influence functions for micromachined membrane deformable mirror and their superposition nature are introduced.
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