衍射光学元件(DOE)表面形貌的测量需要解决因表面结构深度较大和表面不连续给测量带来的困难。
The surfaces of diffraction optical element (DOE) are often deep and discontinuous, which lead to some difficulties for measurement of the 3-d surface topography of DOE.
衍射光学元件(DOE)表面形貌的测量需要解决因表面结构深度较大和表面不连续给测量带来的困难。
The surfaces of diffraction optical element (DOE) are often deep and discontinuous, which lead to some difficulties for measurement of the 3-d surface topography of DOE.
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