The support device is equipped with vacuum chuck. So no manual holding is needed on spreading.
支撑装置中有真空吸盘，涂胶时无需人工扶持。
According to schemes analysis, vacuum chuck with porous ceramic is selected for the vacuum clamping system.
通过对硅片夹持系统方案的分析，选用多孔陶瓷真空吸盘，并在此基础上研制了真空夹持系统。
We can combine a certain material, namely, artificial bristle material, which has the same function of a wall lizards feet with the vacuum chuck to improve the function of present equipment.
利用壁虎爬墙的原理，制造出能和壁虎的脚功能相近的材料，把壁虎的爬墙功能和现有的真空吸盘式爬墙系统结合起来，弥补现有设备的缺陷。
There are water cooling target chuck and back flanges on the top of the vacuum chamber.
真空室顶部预留了法兰口并配有冷却靶台。
There are water cooling target chuck and back flanges on the top of the vacuum chamber.
真空室顶部预留了法兰口并配有冷却靶台。
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