The technique of ultra-precision machining is sumnlarized in the paper.
介绍超精密加工技术概要；
A miniaturized ultra-precision CNC milling machining system is presented.
一个小型化的超精密数控铣床加工系统。
Abrasive machining plays an important role in precision and ultra-precision processing technology.
磨粒加工是现代精密与超精密加工中重要的加工方法。
The tool clamping head based on hydraulic expansion is a kind of ultra-precision tool clamping head.
静压膨胀式刀具夹头是一种采用静压膨胀原理夹持刀具的超高精度刀具夹头。
The polishing technology of membrane is a new grinding technology in the field of ultra-precision manufacture.
薄膜抛光技术是超精密磨削领域中一种新兴的磨削技术。
Accurately position measuring of online measuring system is the key in developing of ultra-precision machine tool.
作为重点技术攻关项目，超精密机床的研制关键在于在线检测系统能否准确地定位测量。
Machining KDP crystal with an ultra-smooth surface is a key subject in the field of modern ultra-precision machining.
加工超光滑表面的KDP晶体是现代超精密加工技术领域的重点研究课题。
A review of the recent oversea research on the mechanism of ultra-precision cutting and the research methods are given.
介绍国外应用分子动力学研究超精密切削机理的现状和方法。
The cutting experiment is proceeded with a self-made fast servo tool and a computer control system on ultra-precision lathe.
利用所研制的快速伺服刀架、计算机控制系统，在超精密车床上进行了切削试验。
The surface quality of the ultra-precision machined substrates greatly affects the performance of the thin films grown on it.
基片是薄膜材料生长的载体，其超精密加工表面质量直接影响薄膜性能。
In view of this, this thesis proposes the use of abrasive flowing machining technology for ultra-precision polishing of nozzle.
鉴于此，本文提出了采用磨粒流加工技术对喷油嘴进行超精密抛光。
The latest developments in main areas of precision and ultra-precision manufacturing technology at home and abroad were introduced.
介绍了精密和超精密加工技术各主要领域国内外的最新进展。
This paper studies the ultra-precision machining mechanism of the brittle crystal materials by carrying out single diamond turning experiment.
用单刃金刚石车削试验研究超精密加工脆性晶体材料的机理。
The conditioning ring polishing machining is used for ultra-precision planarization; and kinematical analysis on pitch polishing is carried out.
修正环型抛光机用于超精密平面抛光，并对沥青抛光进行了运动学分析。
Grinding process is an important machining technique, and it has a wide range of applications in precision machining and ultra-precision machining.
磨削加工技术是制造技术中的重要领域，是实现精密加工、超精密加工中最有效、应用最广的工艺技术。
A good vibration damping measure is very important for the enhanced working accuracy of machine tools, especially for that of ultra-precision machines.
良好的减振措施是提高机床，特别是超精密机床加工精度的重要技术之一。
This paper describes accurate surface profile measurement of an aspherical lens on an ultra-precision grinding machine using the error separation technique.
描述了一种在超精密磨削机床上基于误差分离法的非球面表面形状精密测量系统。
The paper shows the measuring results of blunt radius of diamond tool, precision glass grating and profile and topography of ultra-precision polished ceramics.
给出了金刚石刀具钝圆半径与精密玻璃光栅和超精密抛光陶瓷的轮廓形貌的测量结果。
To machining of aspheric part of high precision and high quality, interpolation algorithm of ultra-precision aspheric numerical control system is very important.
为了加工出高质量的非球曲面器件，超精密非球曲面数控系统的数控插补算法非常重要。
A new micro-positioning control system using PZT for ultra-precision grinding was designed. The functions of this system include measure, compensate, drive, etc.
介绍了一种最新开发的面向精密磨床的压电陶瓷驱动微进给控制系统，该系统是一个驱动、检测和补偿为一体的闭环系统。
In diamond ultra-precision turning, there is unavoidably, a relative vibration between the tool and the workpiece, which influences the quality of workpiece surface.
在金刚石超精密车削加工中，刀具与工件之间不可避免地存在一定的振动，从而影响工件表面质量。
According to the performance requirement of the ultra-precision machine feed drive servo system and the characteristic of "direct drive", the control structure is designed.
并根据高速机床进给系统伺服性能的要求和直接驱动的特点，搭建直线电机控制系统平台。
Detailed analyses of the grain size distribution characteristics and the grain profile wavelength of fine diamond grinding wheel used for ultra-precision grinding are presented.
对超精密磨削所用细粒度金刚石砂轮磨粒粒径的分布特点和砂轮表面上磨粒的轮廓波长进行了分析。
The research content of this paper will also have important instruction meaning for the lasers crystal materials' growth preparation, ultra-precision processing and application.
本文研究内容也将对激光晶体材料的生长制备、超精密加工及其应用技术具有重要的指导意义。
We worked out YH-1 ultra-precision machining tool CNC software, which is characterized with high resolution, short interpolation period and optics universal equation interpolation.
编制了YH - 1超精密数控机床数控系统软件，该软件具有分辨率高、插补周期短的特点，并且具有光学普适方程的插补功能。
It is a sign of the machining level of ultra-precision cutting reflected by the achieving of minimum cutting thickness. And it will be significant to the analysis of extra thin cutting.
最小切削厚度的获得是反映超精密切削加工水平的重要标志，因此对极薄切削进行分析具有重要意义。
Based on the analysis of the structure and vibration of HCM-I Submicro CNC Ultra-precision Turning Machine, the mechanical model of active vibration isolation system is set up in the paper.
本文以HCM_I型亚微米超精密车床为研究背景，在分析了机床结构与振动的基础上，建立了机床主动隔振系统的力学模型。
With the increasing demands for higher accuracy and higher productivity of the ultra-precision equipments, ultra-precision gas bearing stage systems driven by linear motor become research hotspots.
随超精密装备加工精度和生产率的不断提高，直线气浮系统得到广泛重视和研究。
In this paper, the typical 6 kinds of optical glasses have been grinding by the ultra-precision grinding, brittle-ductile transition's critical depth of brittle materials is researched theoretically.
利用超精密磨床磨削加工6种典型的光学玻璃，先从理论上研究了脆性材料脆塑转变的临界值。
Motion control system of an ultra precision wafer stage with application to integrated circuit production was presented.
描述一种应用于集成电路制造的超精密硅片台系统及其运动控制。
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