Helium ion microscopy (HIM) offers the highest spatial resolution surface imaging of any scanning beam method, as well as extremely high surface sensitivity.
氦离子显微镜能够提供所有扫描射线法中最高空间分辨率的表面图像，以及极高的表面灵敏度。
The content of this article includes Auger electron emission, surface sensitivity, measurement of Auger electron spectrum, qualitative and quantitative analysis, depth profile etc.
俄歇电子发射，表面灵敏性，俄歇电子谱的测量，定性和定量分析，深度剖析等。
The content of this article includes Auger electron emission, surface sensitivity, measurement of Auger electron spectrum, qualitative and quantitative analysis, depth profile etc.
俄歇电子发射，表面灵敏性，俄歇电子谱的测量，定性和定量分析，深度剖析等。
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