MEMS dynamic testing system based on stroboscopic microscopic interferometry is introduced. The algorithm of data analyzing is developed.
介绍了基于频闪显微干涉技术的MEMS动态测试系统的测量原理，设计了数据分析处理算法。
A stroboscopic microscopic interferometry based on Fourier transform method (FTM) is put forward to measure the out-of-plane motion of micro-resonator and micro-cantilever.
提出一种基于傅里叶变换的频闪显微干涉测试方法，对微谐振器和微悬臂梁的离面运动进行测试研究。
A stroboscopic microscopic interferometry based on Fourier transform method (FTM) is put forward to measure the out-of-plane motion of micro-resonator and micro-cantilever.
提出一种基于傅里叶变换的频闪显微干涉测试方法，对微谐振器和微悬臂梁的离面运动进行测试研究。
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