A new experimental method for measuring resonant frequencies of objects is proposed by use of rotating shearing stroboscopic speckle interferometry.
提出一种测量物体固有频率的新方法———旋转剪切频闪散斑干涉法。
This system employed optical flow technology and microscopic interferometry combining with stroboscopic illumination to realize the measurement of in-plane and out-of-plane motions of MEMS devices.
系统分别采用光流技术和显微干涉技术，结合频闪照明的方法，对MEMS器件的面内和离面运动特性进行了测量。
Both theory and experiments show that stroboscopic shearing speckle interferometry is obviously superior to time-average method.
理论和实验都表明频闪剪切散斑干涉照相法要优于时间平均剪切散斑干涉照相法。
A stroboscopic microscopic interferometry based on Fourier transform method (FTM) is put forward to measure the out-of-plane motion of micro-resonator and micro-cantilever.
提出一种基于傅里叶变换的频闪显微干涉测试方法，对微谐振器和微悬臂梁的离面运动进行测试研究。
MEMS dynamic testing system based on stroboscopic microscopic interferometry is introduced. The algorithm of data analyzing is developed.
介绍了基于频闪显微干涉技术的MEMS动态测试系统的测量原理，设计了数据分析处理算法。
MEMS dynamic testing system based on stroboscopic microscopic interferometry is introduced. The algorithm of data analyzing is developed.
介绍了基于频闪显微干涉技术的MEMS动态测试系统的测量原理，设计了数据分析处理算法。
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