A novel beam-membrane structure was proposed, with a small size and obvious effect of centralizing stress, especially fitting low scale pressure sensor of strain type.
提出了一种新型的梁膜结构,其体积较小、应力集中效应明显,特别适合作小量程应变式压力传感器。
A novel beam-membrane structure was proposed, with a small size and obvious effect of centralizing stress, especially fitting low scale pressure sensor of strain type.
提出了一种新型的梁膜结构,其体积较小、应力集中效应明显,特别适合作小量程应变式压力传感器。
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