The step scan project can solve the speed and accurate problem effectively, and can be applied for most requirements.
分步扫描方案能够有效的解决标记速度和标记精度问题，能够适应大多数的打标要求。
This paper mainly analyzes the pneumatic structure and the principle of the step&scan stage, pointing out some concerned issues in pneumatic design&control.
着重分析了步进扫描工作台的气浮结构及原理，指出了气浮设计及控制中需要注意的一些问题。
This paper mainly analyzes the pneumatic structure and the principle of the step&scan stage, pointing out some concerned issues in pneumatic design&control.
着重分析了步进扫描工作台的气浮结构及原理，指出了气浮设计及控制中需要注意的一些问题。
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