In the paper, a theoretical analysis is given for the ordinary helium mass spectrometer method used to detect the "single seal" leakage rate of each two seals in a serial two-seal pneumatic system.
从理论上讨论了用常规氦质谱仪检漏方法测定两密封件串联密封的气路系统各密封件“单密封”泄漏率的问题。
In the paper, a theoretical analysis is given for the ordinary helium mass spectrometer method used to detect the "single seal" leakage rate of each two seals in a serial two-seal pneumatic system.
从理论上讨论了用常规氦质谱仪检漏方法测定两密封件串联密封的气路系统各密封件“单密封”泄漏率的问题。
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