Based on the imaging principle of SEM, the equation for illustrating the theoretical resolution of secondary electron image has been deduced in this paper.
本文是从扫描电子显微镜的成像原理出发，推导了有关阐明二次电子像理论分辨率的公式。
Based on the imaging principle of SEM, the equation for illustrating the theoretical resolution of secondary electron image has been deduced in this paper.
本文是从扫描电子显微镜的成像原理出发，推导了有关阐明二次电子像理论分辨率的公式。
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